发明名称 Method for fabricating a thin film transistor
摘要 A method of fabricating a thin film transistor includes forming an amorphous silicon layer as an active layer on a substrate, forming a gate insulating layer and a gate electrode on the amorphous silicon layer, doping impurities of a first conductive type in the amorphous silicon layer, forming a metal layer on the exposed portions of the amorphous silicon layer, and crystallizing the amorphous silicon layer by applying thermal treatment and electric field to the resultant substrate.
申请公布号 US6784034(B1) 申请公布日期 2004.08.31
申请号 US19980170625 申请日期 1998.10.13
申请人 LG. PHILIPS LCD CO., LTD. 发明人 CHOI DUCK-KYUN
分类号 H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L21/336 主分类号 H01L21/336
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