发明名称 Cutting device for breaking fragile materials such as semiconductor wafers or the like
摘要 A cutting device for breaking fragile materials is constructed to include a lifting mechanism adapted to move the cutter vertically, a rotary table adapted to control the cutting angle of the cutter on the workpiece, a feed mechanism adapted to control the federate of the cutter, and a rotary mechanism adapted to rotate the cutter for enabling the cutter to cut the workpiece with one of multiple cutting points thereof selectively.
申请公布号 US6782883(B2) 申请公布日期 2004.08.31
申请号 US20030358251 申请日期 2003.02.05
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 CHEN KUEI-JUNG;CHEN MENG-CHUN;LAI CHIH-YI
分类号 B28D5/00;H01L21/00;H01L21/301;(IPC1-7):B28D1/32 主分类号 B28D5/00
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