发明名称 |
Cutting device for breaking fragile materials such as semiconductor wafers or the like |
摘要 |
A cutting device for breaking fragile materials is constructed to include a lifting mechanism adapted to move the cutter vertically, a rotary table adapted to control the cutting angle of the cutter on the workpiece, a feed mechanism adapted to control the federate of the cutter, and a rotary mechanism adapted to rotate the cutter for enabling the cutter to cut the workpiece with one of multiple cutting points thereof selectively.
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申请公布号 |
US6782883(B2) |
申请公布日期 |
2004.08.31 |
申请号 |
US20030358251 |
申请日期 |
2003.02.05 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
CHEN KUEI-JUNG;CHEN MENG-CHUN;LAI CHIH-YI |
分类号 |
B28D5/00;H01L21/00;H01L21/301;(IPC1-7):B28D1/32 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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