发明名称 |
Electropolishing method |
摘要 |
A target material is electropolished by applying a voltage between an anode electrode and a counter electrode while bringing the anode electrode into contact with the surface of the target material. The anode electrode is formed of an electrode material having a current density not higher than 10 mA/cm<2 >upon application of a voltage of +2.5V vs. silver/silver chloride electrode within a 0.1 M perchloric acid solution in an electrochemical measurement using a potentiostat.
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申请公布号 |
US6783658(B2) |
申请公布日期 |
2004.08.31 |
申请号 |
US20020261949 |
申请日期 |
2002.10.02 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MATSUI YOSHITAKA;KOSUKEGAWA HIROSHI;KODERA MASAKO;MIYASHITA NAOTO |
分类号 |
B23H3/06;B23H5/08;C25F3/00;C25F3/16;C25F3/30;C25F7/00;H01L21/321;(IPC1-7):B23H11/00;B23H3/00;B23H5/00 |
主分类号 |
B23H3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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