发明名称 Electropolishing method
摘要 A target material is electropolished by applying a voltage between an anode electrode and a counter electrode while bringing the anode electrode into contact with the surface of the target material. The anode electrode is formed of an electrode material having a current density not higher than 10 mA/cm<2 >upon application of a voltage of +2.5V vs. silver/silver chloride electrode within a 0.1 M perchloric acid solution in an electrochemical measurement using a potentiostat.
申请公布号 US6783658(B2) 申请公布日期 2004.08.31
申请号 US20020261949 申请日期 2002.10.02
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUI YOSHITAKA;KOSUKEGAWA HIROSHI;KODERA MASAKO;MIYASHITA NAOTO
分类号 B23H3/06;B23H5/08;C25F3/00;C25F3/16;C25F3/30;C25F7/00;H01L21/321;(IPC1-7):B23H11/00;B23H3/00;B23H5/00 主分类号 B23H3/06
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