| 发明名称 |
Integrated circuit dielectric and method |
| 摘要 |
A xerogel aging system includes an aging chamber (190) with inlets and outlet and flows a gel catalyst in gas phase over a xerogel precursor film on a semiconductor wafer. Preferred embodiments use an ammonia and water vapor gas mixture catalyst.
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| 申请公布号 |
US6784121(B1) |
申请公布日期 |
2004.08.31 |
| 申请号 |
US19980178249 |
申请日期 |
1998.10.23 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
JIN CHANGMING;LIST RICHARD SCOTT;LUTTMER JOSEPH D. |
| 分类号 |
C23C18/12;H01L21/3105;H01L21/316;H01L21/768;H01L23/522;H01L23/532;(IPC1-7):H01L21/31;H01L21/469 |
主分类号 |
C23C18/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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