| 摘要 |
The present invention provides, in one aspect, an optical device, a method of manufacture therefor, and an optical system including the same. The optical device may include a membrane configured to be electrically deformable and reflective. The membrane may further be positioned over a cavity located within a substrate. The device may additionally include a transmissive spacer coupled to the substrate, and a lens coupled to the transmissive spacer and optically aligned with the membrane.
|
