THREE-AXIS LINEAR MOTION STAGE USING FLEXIBLE TOOL MECHANISM

摘要

PURPOSE: A three-axis linear motion stage using a flexible tool mechanism is provided which uses a flexible complex hinge structure and a symmetrical amplification structure to generate a pure straight movement. CONSTITUTION: A number of flexible complex hinge structures(11) are arranged adjacently to each edge of an X-stage(1) and the first driving part(2) is formed on one side of the X stage to enable a straight movement along one side. A Y stage(20) is formed on a center of the X stage, and a number of flexible complex hinge structure(28) are arranged adjacently to each edge of the Y stage, and the Y stage performs a straight movement along a vertical axis by the second driving part formed on one side of the Y stage. A Z stage(40) is installed on the Y stage, and a number of flexible complex hinge structures are formed in each edge and has the third driving part to enable a straight movement along a vertical direction to the axes. And the X stage is installed on a stage base(9).