发明名称 WAFER DICING/BONDING SHEET AND PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 <p>THE WAFER DICING/BONDING SHEET OF THE PRESENT INVENTION COMPRISES A SOFT FILM, A PRESSURE SENSITIVE ADHESIVE LAYER FORMED ON THE SOFT FILM, A PROCESSING FILM FOR POLYIMIDE TYPE RESIN COMPOSED OF A HEAT RESISTANT RESIN WHICH HAS BEEN FORMED ON THE PRESSURE SENSITIVE ADHESIVE LAYER AND A POLYIMIDE ADHESIVE LAYER FORMED ON THE PROCESSING FILM. IT IS PREFERRED THAT THE PROCESSING FILM BE A POLYETHYLENE NAPHTHALATE FILM WHOSE SURFACE HAS BEEN SUBJECTED TO AN ALKYD RELEASE TREATMENT. THE PRESENT INVENTION FACILITATES EXPANSION TO BE CONDUCTED AFTER THE WAFER DICING. (FIG. 4)</p>
申请公布号 MY118036(A) 申请公布日期 2004.08.30
申请号 MY1997PI00194 申请日期 1997.01.18
申请人 LINTEC CORPORATION 发明人 NORITO UMEHARA;MASAZUMI AMAGAI;MAMORU KOBAYASHI;KAZUYOSHI EBE
分类号 B32B27/06;H01L21/208;H01L21/301;H01L21/304;H01L21/68;H01L23/495 主分类号 B32B27/06
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