发明名称 Semiconductor device and manufacturing method thereof
摘要 Interfaces between an Al alloy layer and a Ti-containing layer are present in a through hole formed between a lower layer interconnection and an upper layer interconnection. In the interfaces, resistance element regions are formed through heat treatment. A resistance value between the lower layer interconnection and the upper layer interconnection can be adjusted by means of the resistance element region.
申请公布号 US2004164417(A1) 申请公布日期 2004.08.26
申请号 US20030642170 申请日期 2003.08.18
申请人 RENESAS TECHNOLOGY CORP. 发明人 YAMASHITA YASUNORI;HATASAKO KENICHI
分类号 H01L21/768;H01L21/02;H01L21/82;H01L21/822;H01L23/522;H01L23/525;H01L27/04;(IPC1-7):H01L23/48 主分类号 H01L21/768
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