RESISTANCE VARYING ELEMENT AND METHOD OF MANUFACTURING IT

摘要

PROBLEM TO BE SOLVED: To provide a resistance varying element superior in reliability for suppressing variation in the characteristic of a resistance varying element using a phase varying material for recording layer, and to provide a method of manufacturing it.

SOLUTION: The resistance varying element has a first electrode 3, and a dielectric layer 4 and a recording layer 7 with a contact hole 5 formed over them provided on a substrate 1. The recording layer 7 is sandwiched by the first electrode 3 and a second electrode 8. A resistance value of the layer 7 is varied by an electrical pulse impressed between the electrode 3 and the electrode 8. A contact layer 6 of the recording layer is formed between the dielectric layer 4 and the recording layer 7. The contact layer 6 is preferably formed by group 2-6 semiconductor (e.g. ZnS) and preferably includes SiO2.

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