| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film pattern forming system securing high reflexivity, high adhesiveness and thermal stability of a reflective film. SOLUTION: The thin film pattern forming system of the present invention is provided with a means forming the reflective film of a metallic material having high reflexivity including an adhesive material in advance, on a substrate. By using this system, an adhesive material layer having only a required amount of the adhesive as the adhesive layer can be formed on a reflective film surface, to avoid lowering of light reflectance caused by the formation of an excessive amount of the adhesive material layer on the reflective film surface, and to secure adhesive strength of the reflective film. COPYRIGHT: (C)2004,JPO&NCIPI |
