发明名称 SEMICONDUCTOR DEVICE, AND ITS MANUFACTURING AND DESIGNING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of securing a resistance value required for a circuit, and to provide a method of manufacturing and designing the semiconductor device. SOLUTION: The method of forming a capacitor C comprises the steps of forming the capacitor C on a silicon substrate 1 by laminating a polysilicon film 3 through a silicon oxide film 2, forming a first interlayer insulating layer 4 on the upper surface of the film 3, opening a contact hole 1H in the layer 4, forming an aluminum wiring layer 5 on the upper surface of the layer 4, forming a second interlayer insulating layer 6 on the upper surface of the layer 5, opening via holes 2H of the number according to the capacitance of the capacitor C in the layer 6, and forming the layer 5 on the upper surface of the via holes 2H. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004241548(A) 申请公布日期 2004.08.26
申请号 JP20030028155 申请日期 2003.02.05
申请人 SEIKO EPSON CORP 发明人 TAGAKI MASATOSHI
分类号 H01L21/768;H01L21/822;H01L27/04;(IPC1-7):H01L21/768 主分类号 H01L21/768
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