| 摘要 |
PROBLEM TO BE SOLVED: To actualize compact structures of multi-axis interferometers. SOLUTION: Multi-axis plane mirror interferometers 300, 400, 500, and 600 use shared measurement and reference beams respectively reflected from a measurement reflector 140 and a reference reflector 180. Thereafter, the beams are divided into individual beams corresponding to measurement axes of the interferometers. Accordingly, an N-axis interferometer requires N + 1 measurement beam optical paths only; one optical path is for the shared measurement beam, and the N optical paths are for individual measurement beams for providing each measurement axis with two reflections for canceling angular misalignment between the measurement reflector 140 and the reference reflector 180. COPYRIGHT: (C)2004,JPO&NCIPI
|
