| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump capable of improving cooling efficiency, increasing exhaust amount, and reducing energy consumption. SOLUTION: In this cryopump 50 equipped with a second heat station 53; a radiation shield 60 accommodating the second heat station 53 in an accommodation area 602 formed by a bottom plate 606 and a side wall 607 vertically and continuously provided from the bottom plate 606 and having an air suction opening 601 which can suck outside air into the accommodation area 602; and a vacuum chamber 64 surrounding the radiation shield 60 with a prescribed gap area 642 sandwiched and having an inlet opening 641 communicating the gap area 642 with the outside from an outer periphery of the air suction opening 601, a communicating hole 603 for communicating the accommodation area 620 with the gap area 642 is provided at the side wall 607. COPYRIGHT: (C)2004,JPO&NCIPI
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