发明名称 AN APPARATUS FOR AND A METHOD OF MANUFACTURING A SINGLE CRYSTAL ROD
摘要 An apparatus (1) is provided for manufacturing a single crystal rod (2) from a poly crystal feed rod (3), said apparatus (1) comprising a closed chamber (4), at which chamber (4) the feed rod (3) is located, said chamber (4) comprising an annular energy supply (5) arranged around the feed rod (3) for melting off the one end (23) of the rod for providing single crystals, said apparatus comprising first moving means (6) for axial movement of the feed rod (3) and second moving means (7) for a rotating relative movement between the feed rod (3) and the annular energy supply (5). The apparatus (1) comprises a monitoring system (8) for recording the distance between the surface (9) of the feed rod (3), and an annular inwardly radially facing reference face associated with the energy supply (5), and third moving means (10) for regulating the distance. Hereby an apparatus and a method are accomplished that enable use of irregular feed rods that assume other shapes than the optimal cylindrical shape and also enable use of curved cylindrical an elliptical rods with irregular surface.
申请公布号 WO2004072333(A1) 申请公布日期 2004.08.26
申请号 WO2004DK00087 申请日期 2004.02.06
申请人 TOPSIL SEMICONDUCTOR MATERIALS A/S;JENSEN, LEIF;PETERSEN, JAN, EYVING;VAABENGAARD, PER 发明人 JENSEN, LEIF;PETERSEN, JAN, EYVING;VAABENGAARD, PER
分类号 C30B13/00;C30B13/32 主分类号 C30B13/00
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