发明名称 |
Method and apparatus for reducing particle contamination |
摘要 |
A method and device for gradually equalizing air or gas pressures between substrate processing chambers prior to transfer of a substrate between the chambers. The device comprises a gas flow restrictor provided in the chamber wall that separates the chambers. A door typically reversibly seals the gas flow restrictor. During substrate processing in one of the chambers, the gas flow restrictor is sealed to maintain a partial vacuum pressure in the chamber. Prior to opening the wafer transfer gate between the chambers, the gas flow restrictor door is opened to facilitate the gradual flow of air or gas from the higher-pressure chamber, through the gas flow restrictor to the lower-pressure chamber and substantially equalize the pressures in the respective chambers.
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申请公布号 |
US2004163539(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
US20030371457 |
申请日期 |
2003.02.20 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
FANG BUH-KUAN |
分类号 |
H01L21/00;(IPC1-7):B01D46/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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地址 |
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