发明名称 POLISHING METHOD FOR INNER SURFACE OF TUBULAR BRITTLE MATERIAL AND TUBULAR BRITTLE MATERIAL OBTAINED BY POLISHING METHOD
摘要 <p>An object of the present invention is to provide a polishing method for producing, in a relatively short period of time, a tubular brittle material having an inner surface of high surface precision with a maximum roughness Rmax of 0.1 µm or smaller and a center line average roughness Ra of 0.01 µm or smaller, and to provide a tubular brittle material with high precision using said polishing method. The polishing method according to the invention is characterized by that the inner surface of the tubular material being pre-cut into a tubular shape using a honing machine is further polished with a sheet material having diamond abrasives attached thereon. Also claimed is a tubular brittle material obtained by said polishing method.</p>
申请公布号 WO2004071709(A1) 申请公布日期 2004.08.26
申请号 WO2004EP01267 申请日期 2004.02.11
申请人 HERAEUS TENEVO AG;SHIN-ETSU QUARTZ PRODUCTS CO. LTD.;TSUMURAYA, TAKEO;SUZUKI, MASANORI 发明人 TSUMURAYA, TAKEO;SUZUKI, MASANORI
分类号 B24B5/40;B24B19/00;B24B33/02;(IPC1-7):B24B33/02 主分类号 B24B5/40
代理机构 代理人
主权项
地址