发明名称 |
POLISHING METHOD FOR INNER SURFACE OF TUBULAR BRITTLE MATERIAL AND TUBULAR BRITTLE MATERIAL OBTAINED BY POLISHING METHOD |
摘要 |
<p>An object of the present invention is to provide a polishing method for producing, in a relatively short period of time, a tubular brittle material having an inner surface of high surface precision with a maximum roughness Rmax of 0.1 µm or smaller and a center line average roughness Ra of 0.01 µm or smaller, and to provide a tubular brittle material with high precision using said polishing method. The polishing method according to the invention is characterized by that the inner surface of the tubular material being pre-cut into a tubular shape using a honing machine is further polished with a sheet material having diamond abrasives attached thereon. Also claimed is a tubular brittle material obtained by said polishing method.</p> |
申请公布号 |
WO2004071709(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
WO2004EP01267 |
申请日期 |
2004.02.11 |
申请人 |
HERAEUS TENEVO AG;SHIN-ETSU QUARTZ PRODUCTS CO. LTD.;TSUMURAYA, TAKEO;SUZUKI, MASANORI |
发明人 |
TSUMURAYA, TAKEO;SUZUKI, MASANORI |
分类号 |
B24B5/40;B24B19/00;B24B33/02;(IPC1-7):B24B33/02 |
主分类号 |
B24B5/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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