SEMICONDUCTOR WAFER MAPPING SYSTEM

摘要

PURPOSE: A semiconductor wafer mapping system is provided to detect the number of wafers and sense bad wafers projected from slots of a cassette by improving the structure of the mapping system. CONSTITUTION: A semiconductor wafer mapping system is used for mapping wafers which are loaded into plural slots(310) of a cassette(300). A detection arm(110) is moved to the upper direction and the lower direction. An elevation unit(120) is used for elevating the detection arm. A projection detection sensor unit(140) is installed at the detection arm in order to sense the bad wafers projected from the slots of the cassette. The projection detection sensor unit is formed with a light emitting sensor and a light receiving sensor. The light emitting sensor and the light receiving sensor are installed cornerwise in order to receive the light of the light emitting sensor.