| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor crystal manufacturing apparatus in which the dissipation of heat from a member for fixing a seed crystal is performed efficiently even in the initial stage of crystal growth and thereby the conversion of a single crystal into polycrystal can be inhibited. SOLUTION: The semiconductor crystal manufacturing apparatus 13 has a seed crystal 36 for growing the semiconductor crystal 33, a seed crystal fixing adapter 37 for fixing the seed crystal 36, and a pulling shaft 35 for pulling the seed crystal 36, which is connected to the seed crystal fixing adapter 37, and is characterized in that a tool 38 for heat exchange is attached to the seed crystal fixing adapter 37. COPYRIGHT: (C)2004,JPO&NCIPI
|
