TEMPERATURE CONTROL METHOD OF SEMICONDUCTOR MANUFACTURING EQUIPMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a temperature control method of a semiconductor manufacturing equipment making a precise temperature control of the semiconductor manufacturing equipment with the use of a plurality of induction heating coils. SOLUTION: Of the temperature control method of the semiconductor manufacturing equipment using heating coils 10 consisting of a plurality of zones, a degree of interference of magnetic flux with a susceptor 12 is preliminarily found. A current value required by each heating coil 10 for generating an amount of heat needed by each zone of the susceptor 12 is calculated. A current corresponding to the above current value is inputted to each heating coil 10. Further, each heating coil 10 with the required current inputted synchronizes or holds within a preset range a frequency/current phase, and makes the temperature control in response to the inputted power. COPYRIGHT: (C)2004,JPO&NCIPI