发明名称 |
3-Axis straight-line motion stage and sample test device using the same |
摘要 |
A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample independently and precisely in the direction of X-axis, Y-axis or Z-axis of rectangular coordinates. The 3-axis straight-line motion stage comprises a bottom plate 40 having predetermined area and thickness; a X-axis stage 10 fixed in a reference area RR of the bottom plate 40 for moving in the direction of X-axis a first X area RX1 positioned from the reference RR to the direction of X-axis; a Y-axis stage 20 positioned within the first X area RX1 and fixed in a second X area RX2 within the first X area RX1 for moving in the direction of Y-axis a second Y area RY1 positioned from the second X area to the direction of Y-axis; and a Z-axis stage 30 fixed in the second Y area RY2 within the first Y area RY1 and supporting a predetermined sample for moving the sample in the direction of Z-axis.
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申请公布号 |
US2004163450(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
US20030726759 |
申请日期 |
2003.12.03 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
GWEON DAE GAB;KIM DONG MIN;SHIM JONG YEOP;KIM KI HYUN |
分类号 |
H01J37/20;B23Q1/34;B23Q1/62;G01N35/00;G01Q10/04;G02B21/00;(IPC1-7):G12B21/22;G01B5/04;G01N13/16;B25J19/04;H02N2/04 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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