| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a simple constitutionθstage highly precisely and rotatably retaining a rotary table. <P>SOLUTION: Thisθstage having a base 2 and the rotary table 3 is provided with a cone-shaped projection 5 in the lower surface of the rotary table 3, and a flat surface 6 extending to its outside, and the base 2 is provided with, at its upper face, a cup-shaped hole 8 mated with the cone-shaped projection 5, and a flat surface 9 extending to its outside. Fluid is fed from the side of the cup-shaped hole 8 to fill between the cone-shaped projection 5 and the cup-shaped hole 8 and between the flat surfaces 6 and 9. The rotary table is thus made to float slightly by the fluid and smoothly rotated. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
