| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever capable of improving face resolution of SCM furthermore than in the case of using the conventional cantilever, concerning the cantilever used for a scanning capacity microscope (SCM). SOLUTION: This cantilever has a probe part 1 for scanning a sample and an electrode part 2 for supporting the probe part 1 as the cantilever to be mounted on the SCM. The probe part 1 is equipped with a quadrangular pyramid-shaped insulator 1a and a conductive wire 1b disposed on only one face of the quadrangular pyramid-shaped insulator 1a. COPYRIGHT: (C)2004,JPO&NCIPI |
