| 摘要 |
PROBLEM TO BE SOLVED: To realize stable and optimum aberration correction and to provide a minimum probe system. SOLUTION: The charged particle optical device for correcting the aberration of charged beams focusing on a sample with an objective lens is equipped with four-step electrostatic quadrupoles 1, 2, 3, 4; two-step electrostatic quadrupoles 5, 6 superposing magnetic potential distribution analogous to the electric potential distribution of the four-step electrostatic quadrupoles 2, 3 in the center of the four-step electrostatic quadrupoles 1, 2, 3, 4; four-step octapoles 11, 12, 13, 14 superposing octapole electric potential on the for-step electrostatic quadrupoles 1, 2, 3, 4; and an additional lens 27 arranged between the four-step electrostatic quadrupoles 1, 2, 3, 4 , the two-step electrostatic quadrupoles 5, 6, and four-step octapoles 11, 12, 13, 14, and the objective lens 7. The optical device is constituted so that aberration adjustment and focus adjustment are independently conducted with the additional lens 27 and the objective lens 7. COPYRIGHT: (C)2004,JPO&NCIPI
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