| 摘要 |
PROBLEM TO BE SOLVED: To form an accurate upper electrode extraction line by eliminating deformation of a mask pattern by forming a film forming mask for the upper electrode extraction line in a luminescent display device with a stable pattern shape. SOLUTION: Lower electrodes 2 are formed on a substrate 1, a luminescent function layer 10 is formed on the lower electrodes 2, and the upper electrode 6 is formed on the function layer 10, so that a luminescent element region E is formed on the substrate 1; and the upper electrode extraction line 7 extracted from the upper electrode 6 is formed on the substrate 1. The upper electrode 6 is formed by using a film forming mask 20A having an upper electrode forming mask pattern 20a opened to the element region E; and at least a part of the upper extraction line 7 is formed by using a film forming mask 20B having a mask pattern 20b for the upper electrode extraction line comprising a plurality of openings without communicating with one another on the upper electrode forming mask pattern side. COPYRIGHT: (C)2004,JPO&NCIPI
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