发明名称 POWER SUPPLY SYSTEM FOR THIN-FILM DEPOSITION APPARATUS AND VACUUM DEVICE
摘要 PROBLEM TO BE SOLVED: To realize stabilization, life extension and easy replacement of a power feeding contact which is pressure-inserted into a revolving power-feeding disc. SOLUTION: The contact contacting a revolving substrate dome is rotatably connected to the lower surface of a power-feeding base. The contact sinks into the revolving substrate dome by its own weight, which enables pressure welding of the contact to the substrate dome without installing a spring. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004238709(A) 申请公布日期 2004.08.26
申请号 JP20030031433 申请日期 2003.02.07
申请人 SHOWA SHINKU:KK 发明人 KASAHARA TOSHIO;HOSOKAWA KIYOSHI;SATO MASANORI
分类号 C23C14/50;(IPC1-7):C23C14/50 主分类号 C23C14/50
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