发明名称 ELECTROPLATING METHOD AND ELECTROPLATING APPARATUS USED FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an electroplating method of a semiconductor device which enables electroplating of an electrode in the semiconductor device. SOLUTION: In the electroplating method, the surface of an anode is composed of a metal more noble than bismuth, and an article to be plated is placed as a cathode. Here, plating current is applied using a solution containing tin and bismuth as an electrolyte. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004238706(A) 申请公布日期 2004.08.26
申请号 JP20030031159 申请日期 2003.02.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAKAMURA MASAYUKI
分类号 C25D3/56;C25D7/12;C25D17/10;H01L21/288;H01L23/50;(IPC1-7):C25D17/10 主分类号 C25D3/56
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