SPATIAL FILTER, METHOD AND PROGRAM FOR GENERATING THE SAME, AND METHOD AND APPARATUS FOR INSPECTING SCREEN DEFECT

摘要

PROBLEM TO BE SOLVED: To provide a spatial filter where a filter configuring numerical value is automatically calculated using a genetic algorithm according to the state of screen defect of an object to be inspected so that fine adjustment is allowed for improved detection capability, and also to provide a generating method thereof, an automatic calculation program for generating the same, and a method and apparatus for inspecting screen defects using the same.

SOLUTION: The genetic algorithm is used to generate a filter of which a component numerical value is a real number. The screen which is to be inspected is imaged with a CCD camera 6. The difference between the image that has been captured by imaging and a background image 14 that is pre-generated is captured to generate an inspection image 15. The inspection image is filtered using the spatial filter to enhance defects. The brightness data of each pixel in an image 16 which has been filtered is statistically calculated, and a defect candidate is extracted by deciding a threshold value based on the brightness statistical data.

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