| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment method capable of securely treating the inside of a depression such as a trench, a contact hole, a deep pattern, or the pore of a porous substrate. SOLUTION: A chemical solution M is fed into an airtight treatment tank 1 accommodating a substrate W, and the inside of the treatment tank 1 is repetitively decompressed and pressurized at the atmospheric pressure or lower several times. Alternatively, alcohol X is brought into contact with the surface of the substrate W, and the alcohol X is allowed to enter a depression W-1. The chemical solution M is fed into the treatment tank 1 accommodating the substrate W up to the water level at which the substrate W is dipped, and the chemical solution M is allowed to enter the depression W-1. The chemical solution M is drained from the treatment tank 1 to decompress the inside of the processing tank 1. Thereby, a part of the chemical solution M entering the depression W-1 and mixed with the alcohol X is evaporated. Such treatment is repeated several times. COPYRIGHT: (C)2004,JPO&NCIPI
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