METHOD FOR DETERMINING COMPOSITION RATIO OF TWO-DIMENSIONAL OR THREE-DIMENSIONAL COMPOSITION GRADIENT FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for determining the composition ratio without estimating the deposition speed, and a method for easily determining the composition ratio on a composition gradient film in an expanded concentration area when the composition gradient film of the expanded concentration area is manufactured. SOLUTION: Each component concentration at the position x on a two-dimensional composition gradient film corresponds to a concentration vector P with the component concentration as a component in a concentration vector space with each component of the two-dimensional composition gradient film as a base vector. The concentration vector P is projected on the normalized concentration vector Q to give the composition ratio r. The composition ratio of the point at the position coordinates x is obtained by utilizing the relationship between the coordinate component of the projected vector Q and the coordinate component of the concentration vector P, and using the measurement of the composition ratio at two arbitrary points. COPYRIGHT: (C)2004,JPO&NCIPI