| 摘要 |
PROBLEM TO BE SOLVED: To precisely and inexpensively measure the gas concentration of on a substrate surface in a micro-area under a microscope, as to the sublimable raw material gas. SOLUTION: The temperature of a cooling unit 9 is set to a supersaturated temperature of the material gas, a substrate 8 is irradiated with a laser beam 71 under a supersaturated condition to start condensation of the gas, the temperature of the cooling unit 9 is set thereafter to a temperature near the saturation temperature of the gas, a growth direction of a condensation crystal 10 to the temperature of the substrate 8 is measured, the saturation temperature of the gas is determined based on the measured result in the growth direction, and the concentration of the gas is found based on the saturation temperature and the vapor pressure-temperature characteristics of the gas. COPYRIGHT: (C)2004,JPO&NCIPI
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