发明名称 SHEAR FORCE DETECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To dispense with a piezoelectric body for excitation, to simplify the structure, to facilitate manufacture, to reduce cost, and to heighten detection sensitivity, in a system using a tuning fork. SOLUTION: In a device for resonating a tuning-fork oscillator 10 where a shear force detection member 15 is mounted, drawing the detection member tip close to a sample, and detecting a voltage induced in the tuning-fork oscillator, an excitation electrode is formed on one vibrator 11 of the tuning-fork oscillator and a detection electrode is formed on the other vibrator 12 respectively, and both vibrators are resonated by applying an excitation voltage to the excitation electrode, and an induction voltage is measured from the detection electrode. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004239677(A) 申请公布日期 2004.08.26
申请号 JP20030027109 申请日期 2003.02.04
申请人 JEOL LTD 发明人 NAKAMOTO KEIICHI
分类号 G01B11/30;G01Q10/04;G01Q60/18;G01Q60/22;(IPC1-7):G01N13/14 主分类号 G01B11/30
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