MANUFACTURING METHOD OF FUNCTIONAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a functional element in which distinguishing by different colors or the like is possible and a pattern of a large area can be formed at a low cost. SOLUTION: This is a manufacturing method of a functional element in which an organic film is formed by coating an organic material using a coating equipment having a contact part for coating a coating solution by making it move relatively on a photo substrate while contacting with the substrate. COPYRIGHT: (C)2004,JPO&NCIPI