CERAMIC SINTERED COMPACT WITH METALLIZED LAYER AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a ceramic sintered compact which is free from the generation of cracks in a via part or the ceramics around the via part in a ceramic substrate with the via part formed thereon, and a method for manufacturing this ceramic compact. SOLUTION: This method manufactures the ceramic sintered compact with a metallized layer by perforating a through hole in a ceramic green sheet composed mainly of a ceramic powder and simultaneously sintering the whole paste containing a metal powder and a solvent after filling the interior of the through hole with the paste. In this method, the ceramic sintered compact with a metallized layer is obtained by charging the paste into a process to dry the solvent of the paste within 20 minutes of the packing of the paste. The ceramic sintered compact is finished by grinding or polishing a manufactured sintered compact. COPYRIGHT: (C)2004,JPO&NCIPI