| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid injection apparatus whose miniaturization has been made possible by reducing a pressure loss applied to the liquid in a liquid vessel. SOLUTION: The liquid injection apparatus comprises a carriage 236 for injecting a liquid from a plurality of nozzles on a liquid injection head 237 to deposit the liquid on a target S while performing relative movement to the target S, a liquid vessel 221 provided at a position apart from the carriage 236 to store the liquid to be supplied to the carriage 236, a flexible supply pipe 226 placed between the liquid vessel 221 and the carriage 236 to form a liquid channel from the liquid vessel 221 to the carriage 236, and a valve mechanism mounted on the carriage 236 and provided in a liquid channel from the supply pipe 226 to the liquid injection head 237. COPYRIGHT: (C)2004,JPO&NCIPI |
