发明名称 |
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE AND A MICROMECHANICAL DEVICE |
摘要 |
The invention relates to a method for producing a micromechanical device and to corresponding micromechanical device consisting of a substrate material (10), a membrane (20) and a hollow space (30) formed in the region of membrane (21) between said substrate and membrane. According to said invention holes (40) are embodied first and foremost in the membrane (20) during a first etching stage and afterwards, the hollow space is produced during a second etching stage. |
申请公布号 |
WO2004071941(A2) |
申请公布日期 |
2004.08.26 |
申请号 |
WO2003DE03194 |
申请日期 |
2003.09.25 |
申请人 |
ROBERT BOSCH GMBH;METZGER, LARS;FISCHER, FRANK |
发明人 |
METZGER, LARS;FISCHER, FRANK |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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