| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new radiation-sensitive acid generator having excellent storage stability, high transparency for radiation and high sensitivity, and to provide a positive radiation-sensitive resin composition containing the above radiation-sensitive acid generator and being excellent in the storage stability, sensitivity, resolution, pattern profile and so on. <P>SOLUTION: The radiation-sensitive acid generator contains at least one kind of sulfonyloxyimide compound having such a structure that an aromatic hydrocarbon group having an electron donating group and/or a heterocyclic group having an electron donating group is bonded to the skeleton having a sulfonyloxyimide group and that the electron donating group is bonded in the moiety of the electron donating atom with the aromatic ring in the aromatic hydrocarbon group or with the heterocycle in the heterocyclic group. The positive radiation-sensitive resin composition contains the above radiation-sensitive acid generator and an acid dissociating group-containing resin. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
