| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a microlens array having an accurate dimsnsion at a low cost for a short period of time by using a lens array mold and ceramics slurry. SOLUTION: A lens array molding space 10a is formed by placing molding plates 12 and 18 face-to-face and a spacer 26 between the molding plates 12 and 18 in a closed loop manner in the cavity 10A of the molding plate holder 10. The molding plate 12 has holes N<SB>11</SB>and N<SB>12</SB>which guide pins G<SB>1</SB>and G<SB>2</SB>go through. The molding plate 18 has lens molding sections L<SB>1</SB>-L<SB>4</SB>and holes N<SB>21</SB>and N<SB>22</SB>which guide pins G<SB>1</SB>and G<SB>2</SB>go through. The molding plates 12 and 18 is formed in a dimensionally accurate manner with a thin film process including a selective plating. A ceramics green plate is formed by filling a silica slurry (ceramics slurry) in the molding space 10a and letting the silica slurry be self-cured. A crystal microlens array is obtained by firing the ceramics green plate taken out from the molding space 10a. COPYRIGHT: (C)2004,JPO&NCIPI
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