ALTERNATELY LAMINATED MOISTUREPROOF FILM, ITS MANUFACTURING METHOD AND ALTERNATELY LAMINATED MOISTUREPROOF FILM WITH TRANSPARENT ELECTRODE PLATE

摘要

PROBLEM TO BE SOLVED: To provide an alternately laminated moistureproof film with high moistureproofness formed on a base of an organic material, its manufacturing method and an alternately laminated moistureproof film with a transparent electrode plate. SOLUTION: This alternately laminated moistureproof film with high moistureproofness comprises a first film of an inorganic material formed on the base of an organic material; a second film of a carbon fluoride series chemical substance formed on the first film; and a third film of an inorganic material formed on the second film. In addition, the alternately laminated moistureproof film is manufactured by sequentially forming the described films on the base of an organic material by vapor deposition or sputtering. Further, the alternately laminated moistureproof film with a transparent electrode plate is obtained by forming the transparent electrode plate on the third film of an inorganic material of the alternately laminated moistureproof film. COPYRIGHT: (C)2004,JPO&NCIPI