发明名称 |
Enhancing light coupling efficiency for ultra high numerical aperture lithography through first order transmission optimization |
摘要 |
A first order transmission optimization (FOTO) top coat may be provided on a photoresist layer to improve the coupling efficiency of first order diffracted light waves during a lithographic imaging operation. The top coat may be a relatively thin layer of a relatively low absorption, low refractive index material. The top coat may be provided in addition to a bottom anti-reflective coating (BARC).
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申请公布号 |
US2004165271(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
US20030371567 |
申请日期 |
2003.02.21 |
申请人 |
KRAUTSCHIK CHRISTOF GABRIEL;ORCZYK MACIEK E.;URATA JOHN M. |
发明人 |
KRAUTSCHIK CHRISTOF GABRIEL;ORCZYK MACIEK E.;URATA JOHN M. |
分类号 |
G03F7/09;G03F7/20;(IPC1-7):B32B1/00;G02B1/10 |
主分类号 |
G03F7/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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