发明名称 Fiber optic chip wih lenslet array and method of fabrication
摘要 A fiber optic chip having one or more fiber-retaining channels and a respective number of lenslets disposed in registry with the channels is provided. The fiber optic chip includes a substrate having a first surface and an etch stop layer disposed proximate the first surface of the substrate. A fiber retaining channel is disposed within the substrate. The fiber channel has an end disposed proximate the first surface of the substrate and has a longitudinal axis extending along the channel. A lenslet is disposed on the etch stop layer and has an optical axis substantially aligned with the longitudinal axis of the channel. In addition, a process is provided for creating a fiber optic chip. The process utilizes the channels as an exposure mask to mark the locations of the lenslets relative to the channels to ensure that the lenslets are accurately registered relative to the respective channels.
申请公布号 US2004165856(A1) 申请公布日期 2004.08.26
申请号 US20040792513 申请日期 2004.03.03
申请人 STEINBERG DAN A. 发明人 STEINBERG DAN A.
分类号 G02B6/122;G02B6/36;G02B6/42;(IPC1-7):G02B6/00 主分类号 G02B6/122
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