摘要 |
PROBLEM TO BE SOLVED: To provide a porous body usable as a functional material for a light emitting device, an optical device and a micro device. SOLUTION: This porous body is provided with a plurality of columnar holes and regions surrounding therearound. The regions are amorphous regions constituted by containing C, Si and Ge or a combined material thereof. The holes 1 are provided perpendicularly or approximately perpendicularly to a film surface, the mean bore diameter of the hole is 20 nm or less, the mean interval is 30 nm or less, and the holes 1 are partitioned by the regions 2. COPYRIGHT: (C)2004,JPO&NCIPI
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