发明名称 POROUS BODY AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a porous body usable as a functional material for a light emitting device, an optical device and a micro device. SOLUTION: This porous body is provided with a plurality of columnar holes and regions surrounding therearound. The regions are amorphous regions constituted by containing C, Si and Ge or a combined material thereof. The holes 1 are provided perpendicularly or approximately perpendicularly to a film surface, the mean bore diameter of the hole is 20 nm or less, the mean interval is 30 nm or less, and the holes 1 are partitioned by the regions 2. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004237430(A) 申请公布日期 2004.08.26
申请号 JP20030068510 申请日期 2003.03.13
申请人 CANON INC 发明人 FUKUTANI KAZUHIKO;DEN TORU
分类号 B82B1/00;C22C45/00;C23C14/06;C23C30/00;(IPC1-7):B82B1/00 主分类号 B82B1/00
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