OPTICAL FUNCTIONAL FILM, METHOD OF FORMING THE SAME, OPTICAL MODULATION ELEMENT USING THE OPTICAL FUNCTIONAL FILM, OPTICAL MODULATION ELEMENT ARRAY, IMAGE FORMING DEVICE AND PLANAR DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical functional film high in adhessiveness of a multilayer film and also to provide an optical functional film capable of imparting an optical function, easy in stress control, capable of controlling the refractive index and the stress of the whole multilayer film, and high in a film forming speed. SOLUTION: The optical functional film includes a multilayer having a plurality of laminated films, the plurality of films are formed with a same material, and the optical functional film is so manufactured that a plurality of adjacent films have different refractive indices. COPYRIGHT: (C)2004,JPO&NCIPI