APPARATUS FOR LAMINATING SUBSTRATES, ELECTRO-OPTICAL DEVICE MANUFACTURED BY THE SAME, ELECTRONICS AND METHOD OF LAMINATING SUBSTRATES

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method of laminating substrates by which two pieces of the substrates are laminated to keep excellent parallelism with high precision. SOLUTION: In the apparatus for laminating the substrates which is provided with a 1st holding member 200 for holding a 1st substrate 300, a 2nd holding member 110 for holding a 2nd substrate 400 and a pressing means for pressing the 2nd substrate to laminate the 2nd substrate 400 on the 1st substrate 300 in a state that the 1st substrate and the 2nd substrate face each other and a supporting member 120 for supporting one of the 1st substrate 300 and the 2nd substrate 400 obliquely movable by deforming itself three-dimensionally is provided at least in one of the 1st holding member 200 and the 2nd holding member 110 and the supporting member 120 is three dimensionally deformed by the press means so that the opposed surfaces of the 1st substrate 300 and the 2nd substrate 400 are nearly parallel to each other. COPYRIGHT: (C)2004,JPO&NCIPI