发明名称 |
Scanning mechanism for high-speed high-resolution scanning |
摘要 |
A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.
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申请公布号 |
US2004165923(A1) |
申请公布日期 |
2004.08.26 |
申请号 |
US20030370472 |
申请日期 |
2003.02.24 |
申请人 |
ACCRETECH (ISRAEL) LTD. |
发明人 |
KARIN JACOB;SHTEIN AMNON;RETTER MIKI;ZIV-AV AMIR;GOLAN GILAD |
分类号 |
B41J19/30;(IPC1-7):B41J19/30 |
主分类号 |
B41J19/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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