| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrode material for an electron emission element, and its manufacturing method as well as an FED, fit for mass production and advantageous in cost, and also capable of lowering a drive voltage and making a display image fine, in case of use as an electrode for the FED. <P>SOLUTION: A recessed part (5) and a protruded part (4) are first formed on the surface of a substrate(1), and then, a thin film (6) made of catalyst particles is formed on the entire surface of the substrate, and finally, brush-shaped carbon nanotubes (7) are made to grow with the catalyst particle of the film surface on the protruded part as the nucleus by applying a chemical vapor deposition method on the thin film. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
