| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror unit in which a large mirror swing angle is given without increasing the thickness of a sacrifice layer. SOLUTION: A substrate 3 is provided, and a micromirror 1 which reflects light, a torsion bar 2 which supports the micromirror 1, a frame part 8 which turnably supports the torsion bar 2, a supporting plate 9 of which the one end is pivotably supported on the substrate 3 and which supporting plate lifts the frame part 8 so as to separate from the substrate 3 by receiving an external acting force at the other end of the supporting plate are provided on the substrate 3, and an acting force supply part 34 for giving the acting force to the supporting plate 9 from the opposite side of the supporting plate 9 with respect to the substrate 3 is also provide on the substrate. COPYRIGHT: (C)2004,JPO&NCIPI |
