| 摘要 |
PROBLEM TO BE SOLVED: To enhance the durability and reliability of equipment by driving an actuator on the rotary member side through a simple structure. SOLUTION: A power generating coil 26 is provided in the spin base 21 of a spin chuck 1 rotating while pinching a wafer W. On the equipment body 30 side containing a motor 2 for rotary driving the spin chuck 1, a plurality of permanent magnet pieces 27 generating a static magnetic field are provided. When the spin base 21 rotates, the power generating coil 26 generates power through electromagnetic induction. That power is rectified and stored by a rectifying/energy storing unit 25 and fed to a motor 23 by an actuator controller 24. The motor 23 operates a chuck pin 22. The actuator controller 24, the rectifying/energy storing unit 25 and the motor 23 are contained in the spin base 21. COPYRIGHT: (C)2004,JPO&NCIPI |
