METHODS AND SYSTEMS FOR CONTROLLING MOVEMENT WITHIN MEMS STRUCTURES

摘要

A method for reducing undesired movements of proof masses (12) in micro-electromechanical systems (MEMS) devices (10) is described where the proof masses are suspended above a substrate by one or more suspensions (14). The method includes providing an anchor (62) on the substrate substantially between a first proof and suspensions for the first proof mass and a second proof mass and suspensions for the second proof mass, coupling a first portion (66) of a beam (64) to the first proof mass, coupling a second portion (68) of the beam to the second proof mass, and attaching a third portion (70) of the beam to the anchor, the third portion extending between the first portion and second portion of the beam, the anchor and the third portion configured to allow for rotation about an axis perpendicular to the substrate.