| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer handling checker for easily determining a degree of the achievement of a wafer operation. SOLUTION: A plurality of wafers 1 where conductive films are formed on surfaces are stored in a slot 11 of a cassette 10. Potentials of "H" levels are given to the respective wafers 1 from a control box 30 through electrodes 13. A conductive absorption part 21 of a pair of vacuum tweezers 20 is connected to ground potential. LED 13 corresponding to the objective wafer 1 for an operation is lighted by an instruction of a computer 40 and an operator operates the instructed wafer 1 by the pair of the vacuum tweezers 20. In the control box 30, potentials of the respective electrodes 13 are detected and determined whether the prescribed wafer 1 is correctly operated or not. When misoperation occurs, it is immediately shown by a buzzer 34, and the result of a general operation is recorded in the computer 40. COPYRIGHT: (C)2004,JPO&NCIPI |
