DEVICE AND METHOD FOR MANAGING FOREIGN MATTER IN VACUUM PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for managing a foreign matter which can manage occurrence of the foreign matter in a vacuum processor. SOLUTION: A foreign matter managing device in a vacuum processor 100 performing a vacuum processing on a sample 10 is provided with a vacuum processing container 2, a gas supply means 5 for supplying processing gas into the vacuum processing container 2, and a sample stand 9 holding the sample 10 by placing it in the vacuum processing container 2. The foreign matter managing device of the vacuum processor is provided with a foreign matter monitor 6 detecting foreign matters floating in the vacuum processing container, a means 14 for creating device state data showing a state of the vacuum processor, and a data integration managing means 200 for specifying and displaying a part where foreign matter occurrence probability is high based on foreign matter data that the foreign matter monitor 6 detects and on device state data. COPYRIGHT: (C)2004,JPO&NCIPI